Specifications

Electrical Characteristics

• Supply voltage: 12 V - 15 V
• Frequency response: 10 kHz
• Output impedance: 100 Ω
• Output current: 5 mA
• Output voltage: +/- 5V

Probe Types

• 5P
• 10P
• 20P
• Custom

Probe Specifications (5P probe type)

• Probe diameter: 5 mm
• Standard probe length: 16 mm
• Maximum measuring range: 1 mm
• Maximum resolution @ 100 Hz: 5 nm
• Maximum sensitivity: 200 mV/um
• Nominal linearity: ≤ 10%
• Linearity with software calibration: ≤ 1%

Probe Specifications (10P probe type)

• Probe diameter: 10 mm
• Standard probe length: 34 mm
• Maximum measuring range: 2 mm
• Maximum resolution @ 100 Hz: 10 nm
• Maximum sensitivity: 100 mV/um
• Nominal linearity: ≤ 10%
• Linearity with software calibration: ≤ 1%

Probe Specifications (20P probe type)

• Probe diameter: 20 mm
• Standard probe length: 41 mm
• Maximum measuring range: 4 mm
• Maximum resolution @ 100 Hz: 20 nm
• Maximum sensitivity: 50 mV/um
• Nominal linearity: ≤ 10%
• Linearity with software calibration: ≤ 1%

Probe Specifications (Custom probe type)

• Probe diameter: Z mm
• Standard probe length: N/A
• Maximum measuring range: Z / 5 mm
• Maximum resolution @ 100 Hz: Z nm
• Maximum sensitivity: 200 mV/um
• Nominal linearity: ≤ 10%
• Linearity with software calibration: ≤ 1%

General Specifications

• Weight: 88g
• Dimensions: 88.6 mm x 1.0 mm x 13.4 mm
• Probe tip material: Polyamide-imide
• Sleeve material: Stainless steel 303 or 316
• Chemical compatibility: Specified to customer request
• Cable length: Up to 3 meters
• Temperature minimum: -10° C
• Temperature maximum: +100° C